Compressor Dual Chiller
- Company Name:FST Inc.
- Membership:Free Member
- Member Since:2003. 11.27
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Myeong-sik, Jang
- Related Keywords:tcu division, chiller, ipa dryer
FST Inc.
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FST Inc.
[Korea]
- Address
- 180-3, Yeongcheon-ri, Dongtan-myeon, Hwaseong-si, Gyeonggi-do
- Phone
- 82-31-3700700
- Contact name
- Myeong-sik, Jang
Description
Compressor Chiller Machanism
Compressor Chiller Product
High reliability, Compressor Dual Chiller
For plasma system temperature control
- High performance for ultra low temperature range Wide applicability
- AMAT ↔LRC, AMAT, LRC, TEL common interface board
- No demand for maintenance, leak free
- Precise +/- 0.1°C stability at idle Touch screen display for intuitive programming and use
- All stainless steel reservoir and coolant plumbing
- Refrigerant : R404a (HFC's, no CFC's)
- Design under SEMI-S2-0200
Summary of Specification
| Chiller model | Single | Dual | Triple |
| Temperature Range | -10 ~ +80 deg. C- | -20 ~ +80 deg. C -10 ~ +80 deg. C |
-10 ~ +80 deg. C -10 ~ +80 deg. C -10 ~ +80 deg. C |
| Temperature Stability | ±0.1°C
|
||
| Cooling Capacity | 2000W/3000W/5000W at +10 deg. C |
||
| Max Flow Rate | 15~30lpm, 0.5MPa | ||
| Interface | RS232C, RS485 and Analog | ||
| Powe Input | 3 phase, 200~220VAC, 60Hz | ||
| Dimensions | 550x800x1100 | 550x900x1710 | 780x850x1980 |
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