Heat-Exchanger Chiller
- Company Name:FST Inc.
- Membership:Free Member
- Member Since:2003. 11.27
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Myeong-sik, Jang
- Related Keywords:tcu division, chiller, ipa dryer
FST Inc.
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Contact us
FST Inc.
[Korea]
- Address
- 180-3, Yeongcheon-ri, Dongtan-myeon, Hwaseong-si, Gyeonggi-do
- Phone
- 82-31-3700700
- Contact name
- Myeong-sik, Jang
Description
Heat Exchanger Machanism
Heat Exchanger Product
High reliability, Heat Exchanger For
Etch, CVD and Diffusion process
- High performance for ultra low temperature range Wide applicability
- AMAT, LRC, TEL, Genus etc. common interface board
- AMAT, LRC, TEL Miscellaneous equipment and compatible communication possible
- No demand for maintenance, leak free
- Precise +/- 0.1°C stability at idle
- Touch screen display for intuitive programming and use
- All stainless steel reservoir and coolant plumbing
- Peculiar materials for high temperature
Heat Exchanger Structure
| Chiller model | Medium temperature | High temperature | |||
| Single | Dual | Triple | Single | Dual | |
| Temperature Range |
+30 ~ +90deg. C |
+30 ~ +90deg. C |
+30 ~ +80 deg. C +30 ~ +80 deg. C +30 ~ +80 deg. C |
+30 ~ +180 deg.C |
+30 ~ +180 deg. C |
| +30 ~ +90deg. C |
+30 ~ +180 deg. C | ||||
| Temperature Stability | ±0.1°C | ||||
| Cooling Capacity | 2,000~ 5,000Watts at 30~80°C |
2,000~ 5,000Watts at 30~80°C |
2,000~ 5,000Watts at 30~80°C |
2000~10,000W atts at 30~80°C |
20kW at 150°C |
| 2,000~ 5,000Watts at 30~80°C |
20kW at 150°C | ||||
| Max Flow Rate | 15~30lpm, 0.5MPa | ||||
| Interface | RS232C, RS485 and Analog | ||||
| Power Input | 3phase, 200~220VAC, 60Hz | ||||
| Dimensions (WxDxH) | 400x700x1100 | 440x740x1145 | 670x660x1928 | 500x740x1020 | 550x840x1500 |
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