IPA Dryer
- Company Name:FST Inc.
- Membership:Free Member
- Member Since:2003. 11.27
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Myeong-sik, Jang
- Related Keywords:tcu division, chiller, ipa dryer
FST Inc.
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Contact us
FST Inc.
[Korea]
- Address
- 180-3, Yeongcheon-ri, Dongtan-myeon, Hwaseong-si, Gyeonggi-do
- Phone
- 82-31-3700700
- Contact name
- Myeong-sik, Jang
Description
IPA Dryer Machanism
IPA Dryer Product
Creating the most advanced wet processing solution in water surface cleaning and drying
- Water mark & Particle free on wafer
- Less processing time
- Unique design of process chamber eliminated whirlpool
- Vaporized IPA reach to deep Contact and high aspect ratio geomatric device
- Isolated & sealed process chamber from environments
- In-situ process with diluted HF
- Down flow drain plus Overflow drain while final rinse
- No VOC emissions
Summary of Specification
| Chiller model | Spray Dryer | Rinse & Dryer | DHF Dryer |
| DHF Function | N/A | N/A | YES |
| Uniformity | N/A | N/A |
≤3% |
| Particle(0.065㎛) | ≤100EA | ≤100EA | ≤50EA |
| PR Application | NO | NO | NO |
| Process time (Sec) | 240" | 300" | 600" |
| Safety | Good (Under S-Mark) | Good (Under S-Mark) | Good (Under S-Mark) |
| Temperature | Hot Temp | Hot Temp | Hot Temp |
| System Footprint | Small | Small | Small |
| System Delivery | 3 Mouth | 3 Mouth | 3 Mouth |
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